The Process
To begin with, high-purity polycrystalline silicon is placed in the Silica crucible of a single crystal pulling system and then melted in a controlled atmosphere (Argon) using a resistance heater. Once the temperature of the melt has stabilized (the melting point is around 1,412 °C), a rotating monocrystalline Silicon seed crystal is dipped into the melt. A slight temperature drop initiates the crystallization of Silicon on the seed crystal. When the seed crystal is slowly pulled upward, a cylindrical Silicon monocrystal hanging on the seed crystal starts to form. The pulling rate and temperature are regulated such that a Silicon monocrystal—whose orientation and structure is identical to those of the seed crystal—can be pulled with a constant diameter.
Applications
Our EKZ-series systems are specially designed for the Cz process and enable the production of high-performance Silicon monocrystals.